Survey on design of MEMS gas sensors integrated with microheaters

Registration ID: IJNRD_180523

Published ID: IJNRD2202030

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Guruprasad B

Keywords- Gas Sensor, Gas Flow Rate analyzer, Micro-Electro-Mechanical Sensor, Complex Gas sensing Environment

In this paper, the predominant emphasis has been made on exploring different existing literatures or researches pertaining to gas-flow sensor design and its implementation with Micro-Electro-Mechanical System (MEMS). Though, the design of a gas senor and MEMS technology often depends on the selection of material and structural constructs, in this survey different literatures and allied materials, efficiency and limitations of the different materials, MEMS design etc., are discussed. Additionally, suitability of the MEMS interfaced gas sensors over different temperature or operating conditions are also discussed in this review letter. This study revealed that selection of the material based on its temperature (behavioral) dependency can be efficient to enable optimal gas sensing. Solutions like Micro-heater MEMS can be the suitable solution; though selection of materials for the different layers such as heaters, substrate etc. remains a challenge. The material with low thermal expansion coefficient and better thermal distribution can be an optimal solution to achieve higher sensitivity. Additionally, to cope up with drifts which often take place at high temperature, metal electrodes made up of Fe, Ni, Co, T, and Platinum can be considered. The augmentation in Micro-heater geometry can also help achieving uniform thermal distribution over high temperature and hence can enable sensitive and reliable performance. To examine flow rate, displacement of a micro-fabricated paddle or fluidic gyroscope sensor can be considered. As MEMS fabrication semi-conductor material can be considered, which despite of high thermal expansion can enable cost-efficient solution. On the other hand, the use of metal electrodes as stated above can reduce thermal expansion and hence can achieve an optimal solution. .

Published Paper   E-Certificate

Guruprasad B (February-2022). Survey on design of MEMS gas sensors integrated with microheaters. INTERNATIONAL JOURNAL OF NOVEL RESEARCH AND DEVELOPMENT, 7(2), 212-226. https://ijnrd.org/papers/IJNRD2202030.pdf

Volume 7 Issue 2, February-2022

Pages : 212-226

Paper Reg. ID: IJNRD_180523

Published Paper Id: IJNRD2202030

Downloads: 000122253

Research Area: Science & Technology

Author Type: Indian Author

Country: Mysuru, karnataka, India

Published Paper PDF: https://ijnrd.org/papers/IJNRD2202030.pdf

Published Paper URL: https://ijnrd.org/viewpaperforall?paper=IJNRD2202030

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